| 1. | In this thesis , scanning force microscopy ( sfm ) was used to study the nanoscale electric phenomena of the surface and interface properties of ferroelectric thin films . the experimental setup was calibrated by measuring potential distribution of the working resistance of integrated chip
在实验仪器的验证方面,选用集成电路芯片测试单元中的埋置条形电阻作为检测对象,在电阻两端外加直流偏压后检测电阻的电势分布,在已知电阻上电势分布的前提下,验证了开尔文力显微镜检测微区表面电势的可靠性。 |
